Precision optical (reference plate)
Precision optical reference plate processed with high-precision grinding and polishing achieves excellent surface flatness, becoming the best choice for interference measurement, imaging system, laser application, and automatic calibration.
Precision optical (reference plate) Specifications
| Material | ZERODUR、CLEARCERAM™-Z、Fused Silica |
| Diameter(Φ) | 10mm~310mm |
| Low grade | General grade | High grade | |
| Diameter tolerance | +/-1mm | ±0.5mm | ±0.2mm |
| Surface quality | 60/40 | 40/20 | 20/10 |
| Parallelism | 3’ | 1’ | 30” |
| Surface flatness | 1/4λ@ 633nm | λ/10 @ 633nm | λ/20 @ 633nm |
|
Thickness tolerance |
±0.8mm | ±0.5mm | ±0.1mm |
